With high flow rate performance, excellent retention capabilities and cleanliness, Cobetter PhotopexTM Nylon Filter Cartridges are able to filter photoresists, solvents and other chemicals in semiconductor processes.
Photopex? Nylon Filter Cartridges use a pure unmodified hydrophilic nylon membrane with guaranteed levels of metal extractable and particle cleanliness. The filter's cleanliness reduces equipment set up time.
Available in a wide variety of sizes and configurations to meet all your requirements. Please contact your Cobetter Sales Engineer for additional information.
Photoresist Filtration
Solvent Filtration
Photochemical Filtration
Higher Efficiency
Naturally Hydrophilic
Better Initial Cleanliness
100% Integrity Tested
| Cartridge | Capsule | |
| Filter Membrane | Nylon 66 | |
| Support | HDPE / PP | |
Cage/Core/End Caps | HDPE / PP | |
| O-ring | TEV or EPDM | |
Shell （Capsule only） | HDPE / PP | |
| Max. Operating Temperature | 50°C | 38°C |
| Max. Operating Pressure | 0.28MPa @ 25°C | 0.34MPa @ 25°C |
| Filter Areas | X1 (?68mm) | X2 (?68mm) |
| 0.9 m2/10" | 1.4 m2/10" | |
Ordering Information
| PPM | 1 | 2 | OTC | 3 | 4 | 5 | 6 |
| Block 1 | Block 2 | Block 3 | Block 4 | Block 5 | Block 6 |
Diameter | Removal Ratings | Nominal Length | O-ring Material | Cleanliness | Package |
X1=?68mm X2=?68mm | NM02=2nm NM05=5nm NM10=10nm NM20=20nm NM40=40nm 0010=0.1μm 0020=0.2μm 0045=0.45μm 0065=0.65μm 0100=1.0μm 0300=3.0μm 0500=5.0μm | 04=4" 10=10" 20=20" | P=TEV E=EPDM | UU= Super clean grade UH= High clean grade U= Semicon grade E= Electronic grade | D=Dry W=Prewet, UPW |
| PPN | 1 | 2 | 3 | OTC | 4 | 5 | 6 | 7 |
| Block 1 | Block 2 | Block 3 | Block 4 | Block 5 | Block 6 | Block 7 |
Diameter | Diameter | Removal Ratings | Nominal Length | O-ring Material | Cleanliness | Package |
_ = HDPE P = PP
| Z1=?83mm X1=?68mm | NM02=2nm NM05=5nm NM10=10nm NM20=20nm NM40=40nm 0010=0.1μm 0020=0.2μm 0045=0.45μm 0065=0.65μm 0100=1.0μm 0300=3.0μm 0500=5.0μm | 04=4" 10=10" 20=20" | P=TEV E=EPDM | UU= Super clean grade UH= High clean grade U= Semicon grade E= Electronic grade | D=Dry W=Prewet, UPW |
F016 / F040 / 118 Serise
PPN | 1 | 2 | 3 | 4 | 5 | 6 |
| PPF1 |
| Block 1 | Block 2 | Block 3 | Block 4 | Block 6 | Block 6 |
Diameter | Removal Ratings | Length | O-ring Material | Cleanliness | Package |
S = ?60mm
| NM20=20nm NM50=50nm 0010=0.1μm 0020=0.2μm 0100=1.0μm | F016E=51.5±0.5mm F040E=112±1.0mm 118E=123.5±1.0mm | P=TEV E=EPDM | UU= Super clean grade UH= High clean grade U= Semicon grade E= Electronic grade | D=Dry W=Prewet, UPW |
Capsule
| PPN | 1 | 2 | 3 | 4 | 5 |
| Block 1 | Block 2 | Block 3 | Block 4 | Block 5 | |||
Membrane | Removal Ratings | Fitting Type | Inlet/Outlet | Vent/Drain | O-ring Material | Package | |
_ = HDPE P = PP | NM02=2nm NM05=5nm NM10=10nm NM20=20nm NM40=40nm 0010=0.1μm 0020=0.2μm 0045=0.45μm 0065=0.65μm 0100=1.0μm 0300=3.0μm 0500=5.0μm | HDPE SW44E=SW SW984E=SW PL54LE=CPL PL54ME=CPL NPT42E=NPT FL64E=CFL PP BFL64-4=CFL BFL64-10=CFL BFL64-20=CFL FL64=CFL PL64M=CPL PL64L=CPL PL54M=CPL PL54L=CPL NPT42=NPT NPT742=NPT NPT942=NPT SW43=SW SW743=SW SW943=SW SW44=SW SW744=SW SW944=SW SW84=SW SW784=SW SW984=SW SW764=SW CBT0M=CPL CBT0L=CPL CBT3M=CPL CBT3L=CPL CBT8M=CPL CBT8L=CPL | 1/4" 1/4" 1/2" 8mm 8mm 1/4" 3/8" 3/8" 3/8" 3/8" 3/8" 3/8" 3/8" 8mm 8mm 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/2" 1/2" 1/2" 3/8" 1/4" 1/4" 3/8" 3/8" 8mm 8mm | 4mm 1/4" 1/4" 4mm 4mm 1/8" 1/4" 1/4" 1/4" 1/4" 1/4" 4mm 4mm 4mm 4mm 1/8" 1/8" 1/8" 4mm 4mm 4mm 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 4mm 4mm | UU= Super clean grade UH= High clean grade U= Semicon grade E= Electronic grade | D=Dry W=Prewet, UPW | |
| PPN | 1 | 2 | 3 | 4 |
| Block 1 | Block 2 | Block 3 | Block 4 | |||
Removal Ratings | Fitting Type | Inlet/Outlet | Vent/Drain | O-ring Material | Package | |
NM02=2nm NM03=3nm NM05=5nm NM07=7nm NM10=10nm NM15=15nm NM20=20nm NM30=30nm 0010=0.1μm 0020=0.2μm | SW43E=SW SW44E=SW SW984E=SW PL54LE=CPL PL54ME=CPL NPT42E=NPT FL64E=CFL | 1/4" 1/4" 1/2" 8mm 8mm 1/4" 3/8" | 4mm 1/4" 1/4" 4mm 4mm 1/8" 1/4" | UU= Super clean grade UH= High clean grade U= Semicon grade E= Electronic grade | D=Dry W=Prewet, UPW | |
COPYRIGHT 2014 Hangzhou Cobetter Filtration Equipment Co.,Ltd ALL RIGHTS RESERVED.
