GasfenderTM is constructed of electronic- grade stainless steel. It is specially designed for the inline gas filtration in the semiconductor process at high temperatures and pressures.
· High flow rates & low pressure drops
· Precise fine filtration @0.003μm
· Electronic-grade stainless steel construction includes internal electro-polishing
· Available in a wide range of sizes to meet all customer requirements
· Excellent chemical compatibility
· 100% helium leak test
| Filter Medium | PTFE |
| Filter Construction | PFA |
| Filter Housing | Stainless 316L |
| Removal Rating | 3nm |
| Fitting Spec | Swagelok / VCR / NPT / Rc |
| Fitting Size | 1/4" / 3/8" / 1/2" |
| Max Operating Temperature | 170°C |
| Max. Operating Pressure | 0.55MPa @121°C 0.34MPa @21°C |
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