Cobetter Chemphobic Filter Series are especially designed and ideally suited for high temperature and corrosive chemicals including hot H2SO4, H3PO4, HNO3, SPM, SC1, and SC2. The PTFE membrane ensures excellent chemical compatibility with consistent particles removal for a wide range of acids, bases and other process chemicals. All fluorine construction minimizes metal extractable and other contaminants and provides high flow rates and extended service life to meet high filtration efficiency.
Ultra-pure cleanliness reduces equipment set up time. Its one-piece structural design makes it easy to install and replace. Available in T, L and In-line configurations which simplify system design.
Application
Semiconductor
Wet etch and clean
Bulk chemicals
Feature
Excellent chemical compatibility
Higher flow rate and longer life time.
Ultra-low metal extractables.
| Membrane | PTFE | ||||
| Supports/Cage/Core/End Caps | PFA | ||||
| O-ring | TEV or FFKM | ||||
| Shell（Disposable onl） | PFA | ||||
| Max. Operating Temperature | 180°C | ||||
| Max. Differential Pressure | Cartridge 0.58MPa @25°C Disposable 0.49MPa @ 25°C | ||||
| Filter Areas | ? 68mm | | ? 83mm | |||
| X1 | X2 | Z1 | Z2 | Z2 | |
| 0.91 m2/10" | 1.21 m2/10" | 1.30 m2/10" | 2.20 m2/10" | 3.00 m2/10" | |
Ordering Information
Cartridge
| CHT | 1 | 2 | 3 | 4 | 5 | 6 | 7 |
| Block 1 | Block 2 | Block 3 | Block 4 | Block 5 |
Diameter | Removal Ratings | End Cap | Nominal Length | O-ring Material |
Z1=?83mm Z2=?83mm Z3=?83mm X1=?68mm X2=?68mm | NM05=5nm NM07=7nm NM10=10nm NM15=15nm NM20=20nm NM30=30nm NM50=50nm 0010=0.1μm 0020=0.2μm 0045=0.45μm 0050=0.5μm 0100=1.0μm 0300=3.0μm 0500=5.0μm 1000=10μm | TC=Standard ?83mm/?68mm CLTC=For Cobetter PFA housing ?83mm/?68mm ETC=For E PFA housing ?83mm TPCJ=For P PFA housing ?68mm | 03=3" ?68mm 04=4" ?68mm 10=10" ?83mm/?68mm 20=20" ?83mm/?68mm 30=30" ?83mm | P=TEV K=FFKM |
| Block 6 | Block 7 | |||
| Cleanliness | Package | |||
XS=＜1 μg/device S=＜3 μg/device L=＜10 μg/device LV=Metal＜10μg/device,low anion M=＜25μg/device H=＜40μg/device E=Electronic grade C=Industrial grade | 7/10nm 7/10nm 7/10nm 10/15/20/30nm ?68mm only 50nm 0.1/0.2/0.45/0.5/1/3/5/10μm 50nm 0.1/0.2/0.45/0.5/1/3/5/10μm 50nm 0.1/0.2/0.45/0.5/1/3/5/10μm | D=Dry W=Prewet, UPW | ||
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